JPS566333B2 - - Google Patents

Info

Publication number
JPS566333B2
JPS566333B2 JP7901877A JP7901877A JPS566333B2 JP S566333 B2 JPS566333 B2 JP S566333B2 JP 7901877 A JP7901877 A JP 7901877A JP 7901877 A JP7901877 A JP 7901877A JP S566333 B2 JPS566333 B2 JP S566333B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7901877A
Other languages
Japanese (ja)
Other versions
JPS5413472A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7901877A priority Critical patent/JPS5413472A/ja
Publication of JPS5413472A publication Critical patent/JPS5413472A/ja
Publication of JPS566333B2 publication Critical patent/JPS566333B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP7901877A 1977-07-04 1977-07-04 Crucible apparatus Granted JPS5413472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7901877A JPS5413472A (en) 1977-07-04 1977-07-04 Crucible apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7901877A JPS5413472A (en) 1977-07-04 1977-07-04 Crucible apparatus

Publications (2)

Publication Number Publication Date
JPS5413472A JPS5413472A (en) 1979-01-31
JPS566333B2 true JPS566333B2 (cg-RX-API-DMAC7.html) 1981-02-10

Family

ID=13678193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7901877A Granted JPS5413472A (en) 1977-07-04 1977-07-04 Crucible apparatus

Country Status (1)

Country Link
JP (1) JPS5413472A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3810312A1 (de) * 1987-03-27 1988-10-06 Futaba Denshi Kogyo Kk Geraet zum erfassen von agglomerationsbildung

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614498A (en) * 1979-07-12 1981-02-12 Sekisui Chem Co Ltd Manufacture of transparent electrically conductive thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3810312A1 (de) * 1987-03-27 1988-10-06 Futaba Denshi Kogyo Kk Geraet zum erfassen von agglomerationsbildung
DE3810312C2 (cg-RX-API-DMAC7.html) * 1987-03-27 1993-07-01 Futaba Denshi Kogyo K.K., Mobara, Chiba, Jp

Also Published As

Publication number Publication date
JPS5413472A (en) 1979-01-31

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