JPS566144B2 - - Google Patents
Info
- Publication number
- JPS566144B2 JPS566144B2 JP14275976A JP14275976A JPS566144B2 JP S566144 B2 JPS566144 B2 JP S566144B2 JP 14275976 A JP14275976 A JP 14275976A JP 14275976 A JP14275976 A JP 14275976A JP S566144 B2 JPS566144 B2 JP S566144B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14275976A JPS5367352A (en) | 1976-11-27 | 1976-11-27 | Measuring method of resistivity for double-layer film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14275976A JPS5367352A (en) | 1976-11-27 | 1976-11-27 | Measuring method of resistivity for double-layer film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5367352A JPS5367352A (en) | 1978-06-15 |
| JPS566144B2 true JPS566144B2 (sv) | 1981-02-09 |
Family
ID=15322904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14275976A Granted JPS5367352A (en) | 1976-11-27 | 1976-11-27 | Measuring method of resistivity for double-layer film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5367352A (sv) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58145140A (ja) * | 1982-02-23 | 1983-08-29 | Nec Corp | 半導体特性測定装置 |
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1976
- 1976-11-27 JP JP14275976A patent/JPS5367352A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5367352A (en) | 1978-06-15 |