JPS5659607A - Cubic system boron nitride synthesizing method - Google Patents
Cubic system boron nitride synthesizing methodInfo
- Publication number
- JPS5659607A JPS5659607A JP13361379A JP13361379A JPS5659607A JP S5659607 A JPS5659607 A JP S5659607A JP 13361379 A JP13361379 A JP 13361379A JP 13361379 A JP13361379 A JP 13361379A JP S5659607 A JPS5659607 A JP S5659607A
- Authority
- JP
- Japan
- Prior art keywords
- cubic system
- monosilane gas
- finely powdered
- silicon
- decomposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Catalysts (AREA)
Abstract
PURPOSE: To obtain cubic system BN under low pressure in a high yield by synthesizing cubic system BN in the presence of finely powdered silicon formed by the thermal decomposition of monosilane gas and AlN as catalyst.
CONSTITUTION: Cubic system BN is synthesized in the presence of a mixture of finely powdered silicon formed by the thermal decomposition of monosilane gas heated to 400W650°C and AlN as catalyst. The oxygen content of the silicon is preferably adjusted to ≤0.01%, so it is desirable to thoroughly substitute Ar, He or other gas inert to monosilane gas for air in an apparatus for decomposing monosilane gas before starting the decomposition. Even if monosilane gas is decomposed in a higher temp. zone, by capturing silicon as a decomposition product in the 400W 650°C region, finely powdered silicon of ≤0.01% oxygen content fit for synthesizing cubic system BN is obtd.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13361379A JPS5659607A (en) | 1979-10-18 | 1979-10-18 | Cubic system boron nitride synthesizing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13361379A JPS5659607A (en) | 1979-10-18 | 1979-10-18 | Cubic system boron nitride synthesizing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5659607A true JPS5659607A (en) | 1981-05-23 |
Family
ID=15108897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13361379A Pending JPS5659607A (en) | 1979-10-18 | 1979-10-18 | Cubic system boron nitride synthesizing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5659607A (en) |
-
1979
- 1979-10-18 JP JP13361379A patent/JPS5659607A/en active Pending
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