JPS565921B2 - - Google Patents
Info
- Publication number
- JPS565921B2 JPS565921B2 JP5239773A JP5239773A JPS565921B2 JP S565921 B2 JPS565921 B2 JP S565921B2 JP 5239773 A JP5239773 A JP 5239773A JP 5239773 A JP5239773 A JP 5239773A JP S565921 B2 JPS565921 B2 JP S565921B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5239773A JPS565921B2 (en) | 1973-05-11 | 1973-05-11 | |
| US05/428,899 US3976379A (en) | 1972-12-28 | 1973-12-26 | Interferometers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5239773A JPS565921B2 (en) | 1973-05-11 | 1973-05-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS503654A JPS503654A (en) | 1975-01-16 |
| JPS565921B2 true JPS565921B2 (en) | 1981-02-07 |
Family
ID=12913659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5239773A Expired JPS565921B2 (en) | 1972-12-28 | 1973-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS565921B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02297010A (en) * | 1989-05-12 | 1990-12-07 | Futaba Corp | Length measuring device |
| JPH04268483A (en) * | 1991-02-22 | 1992-09-24 | Okuma Mach Works Ltd | Measuring method for distance of moving table by utilizing laser and feeding device for executing measurement of distance by laser |
-
1973
- 1973-05-11 JP JP5239773A patent/JPS565921B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS503654A (en) | 1975-01-16 |