JPS5659134U - - Google Patents
Info
- Publication number
- JPS5659134U JPS5659134U JP14007579U JP14007579U JPS5659134U JP S5659134 U JPS5659134 U JP S5659134U JP 14007579 U JP14007579 U JP 14007579U JP 14007579 U JP14007579 U JP 14007579U JP S5659134 U JPS5659134 U JP S5659134U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14007579U JPS5855927Y2 (ja) | 1979-10-09 | 1979-10-09 | 薬液気化器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14007579U JPS5855927Y2 (ja) | 1979-10-09 | 1979-10-09 | 薬液気化器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5659134U true JPS5659134U (ja) | 1981-05-21 |
| JPS5855927Y2 JPS5855927Y2 (ja) | 1983-12-22 |
Family
ID=29371421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14007579U Expired JPS5855927Y2 (ja) | 1979-10-09 | 1979-10-09 | 薬液気化器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5855927Y2 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000061283A1 (fr) * | 1999-04-09 | 2000-10-19 | Mitsubishi Heavy Industries, Ltd. | Dispositif de decomposition de compose halogene organique et dispositif de chauffage de fluide |
| JP2011167680A (ja) * | 2010-01-14 | 2011-09-01 | Rohm & Haas Electronic Materials Llc | 一定濃度の蒸発のための方法およびその方法を使用する装置 |
| JP5856568B2 (ja) * | 2010-12-08 | 2016-02-10 | 四国化工機株式会社 | 殺菌液ガス化装置 |
-
1979
- 1979-10-09 JP JP14007579U patent/JPS5855927Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000061283A1 (fr) * | 1999-04-09 | 2000-10-19 | Mitsubishi Heavy Industries, Ltd. | Dispositif de decomposition de compose halogene organique et dispositif de chauffage de fluide |
| JP2011167680A (ja) * | 2010-01-14 | 2011-09-01 | Rohm & Haas Electronic Materials Llc | 一定濃度の蒸発のための方法およびその方法を使用する装置 |
| JP2016128163A (ja) * | 2010-01-14 | 2016-07-14 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ | 一定濃度の蒸発のための方法およびその方法を使用する装置 |
| JP5856568B2 (ja) * | 2010-12-08 | 2016-02-10 | 四国化工機株式会社 | 殺菌液ガス化装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5855927Y2 (ja) | 1983-12-22 |