JPS5657922A - Controlling device of vibrating stage - Google Patents

Controlling device of vibrating stage

Info

Publication number
JPS5657922A
JPS5657922A JP13299079A JP13299079A JPS5657922A JP S5657922 A JPS5657922 A JP S5657922A JP 13299079 A JP13299079 A JP 13299079A JP 13299079 A JP13299079 A JP 13299079A JP S5657922 A JPS5657922 A JP S5657922A
Authority
JP
Japan
Prior art keywords
vibration
level
vibrated
signal
prescribed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13299079A
Other languages
Japanese (ja)
Inventor
Minoru Onoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13299079A priority Critical patent/JPS5657922A/en
Publication of JPS5657922A publication Critical patent/JPS5657922A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

PURPOSE: To avoid the breakage of the object to be vibrated, by detecting the vibration of the object to be vibrated and controlling the amplitude of the vibration signal so that the vibration signal of the object to be vibrated may hold the prescribed value.
CONSTITUTION: The signal of the detector 9 which is supplied to the digital computer 6 via the A/D converter functions to monitor the vibration level of the object 1 to be vibrated. And this level is compared with the prescribed target level of vibration of the object 1. When the level exceeds the target level, the output data is decreased gradually to limit the vibration of the object 1 to secure the prescribed value for the vibration. And in case the vibration level of the object 1 detected by the detector 9 is less than the prescribed target level, the signal delivered from the digital computer 6 is increased gradually. And then the vibration of the vibrating stage 2 is increased to be approximated to the established value.
COPYRIGHT: (C)1981,JPO&Japio
JP13299079A 1979-10-17 1979-10-17 Controlling device of vibrating stage Pending JPS5657922A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13299079A JPS5657922A (en) 1979-10-17 1979-10-17 Controlling device of vibrating stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13299079A JPS5657922A (en) 1979-10-17 1979-10-17 Controlling device of vibrating stage

Publications (1)

Publication Number Publication Date
JPS5657922A true JPS5657922A (en) 1981-05-20

Family

ID=15094196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13299079A Pending JPS5657922A (en) 1979-10-17 1979-10-17 Controlling device of vibrating stage

Country Status (1)

Country Link
JP (1) JPS5657922A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59228980A (en) * 1983-06-09 1984-12-22 日本電子機器株式会社 Controller for vibrator
JPS60227135A (en) * 1984-04-25 1985-11-12 Nippon Kokan Kk <Nkk> Measuring method of frequency response function

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59228980A (en) * 1983-06-09 1984-12-22 日本電子機器株式会社 Controller for vibrator
JPS60227135A (en) * 1984-04-25 1985-11-12 Nippon Kokan Kk <Nkk> Measuring method of frequency response function

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