JPS5657922A - Controlling device of vibrating stage - Google Patents
Controlling device of vibrating stageInfo
- Publication number
- JPS5657922A JPS5657922A JP13299079A JP13299079A JPS5657922A JP S5657922 A JPS5657922 A JP S5657922A JP 13299079 A JP13299079 A JP 13299079A JP 13299079 A JP13299079 A JP 13299079A JP S5657922 A JPS5657922 A JP S5657922A
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- level
- vibrated
- signal
- prescribed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
PURPOSE: To avoid the breakage of the object to be vibrated, by detecting the vibration of the object to be vibrated and controlling the amplitude of the vibration signal so that the vibration signal of the object to be vibrated may hold the prescribed value.
CONSTITUTION: The signal of the detector 9 which is supplied to the digital computer 6 via the A/D converter functions to monitor the vibration level of the object 1 to be vibrated. And this level is compared with the prescribed target level of vibration of the object 1. When the level exceeds the target level, the output data is decreased gradually to limit the vibration of the object 1 to secure the prescribed value for the vibration. And in case the vibration level of the object 1 detected by the detector 9 is less than the prescribed target level, the signal delivered from the digital computer 6 is increased gradually. And then the vibration of the vibrating stage 2 is increased to be approximated to the established value.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13299079A JPS5657922A (en) | 1979-10-17 | 1979-10-17 | Controlling device of vibrating stage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13299079A JPS5657922A (en) | 1979-10-17 | 1979-10-17 | Controlling device of vibrating stage |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5657922A true JPS5657922A (en) | 1981-05-20 |
Family
ID=15094196
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13299079A Pending JPS5657922A (en) | 1979-10-17 | 1979-10-17 | Controlling device of vibrating stage |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5657922A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59228980A (en) * | 1983-06-09 | 1984-12-22 | 日本電子機器株式会社 | Controller for vibrator |
JPS60227135A (en) * | 1984-04-25 | 1985-11-12 | Nippon Kokan Kk <Nkk> | Measuring method of frequency response function |
-
1979
- 1979-10-17 JP JP13299079A patent/JPS5657922A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59228980A (en) * | 1983-06-09 | 1984-12-22 | 日本電子機器株式会社 | Controller for vibrator |
JPS60227135A (en) * | 1984-04-25 | 1985-11-12 | Nippon Kokan Kk <Nkk> | Measuring method of frequency response function |
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