JPS5656650U - - Google Patents

Info

Publication number
JPS5656650U
JPS5656650U JP1979138670U JP13867079U JPS5656650U JP S5656650 U JPS5656650 U JP S5656650U JP 1979138670 U JP1979138670 U JP 1979138670U JP 13867079 U JP13867079 U JP 13867079U JP S5656650 U JPS5656650 U JP S5656650U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1979138670U
Other languages
Japanese (ja)
Other versions
JPS626684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979138670U priority Critical patent/JPS626684Y2/ja
Publication of JPS5656650U publication Critical patent/JPS5656650U/ja
Application granted granted Critical
Publication of JPS626684Y2 publication Critical patent/JPS626684Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1979138670U 1979-10-05 1979-10-05 Expired JPS626684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979138670U JPS626684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-10-05 1979-10-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979138670U JPS626684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-10-05 1979-10-05

Publications (2)

Publication Number Publication Date
JPS5656650U true JPS5656650U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-05-16
JPS626684Y2 JPS626684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-02-16

Family

ID=29370021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979138670U Expired JPS626684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-10-05 1979-10-05

Country Status (1)

Country Link
JP (1) JPS626684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS626684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-02-16

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