JPS5654685Y2 - - Google Patents
Info
- Publication number
- JPS5654685Y2 JPS5654685Y2 JP16989975U JP16989975U JPS5654685Y2 JP S5654685 Y2 JPS5654685 Y2 JP S5654685Y2 JP 16989975 U JP16989975 U JP 16989975U JP 16989975 U JP16989975 U JP 16989975U JP S5654685 Y2 JPS5654685 Y2 JP S5654685Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16989975U JPS5654685Y2 (en) | 1975-12-13 | 1975-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16989975U JPS5654685Y2 (en) | 1975-12-13 | 1975-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5281012U JPS5281012U (en) | 1977-06-16 |
| JPS5654685Y2 true JPS5654685Y2 (en) | 1981-12-19 |
Family
ID=28648435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16989975U Expired JPS5654685Y2 (en) | 1975-12-13 | 1975-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5654685Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10846846B2 (en) | 2017-08-25 | 2020-11-24 | Nuflare Technology, Inc. | Pattern inspection apparatus and pattern inspection method |
-
1975
- 1975-12-13 JP JP16989975U patent/JPS5654685Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10846846B2 (en) | 2017-08-25 | 2020-11-24 | Nuflare Technology, Inc. | Pattern inspection apparatus and pattern inspection method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5281012U (en) | 1977-06-16 |