JPS5281012U - - Google Patents
Info
- Publication number
- JPS5281012U JPS5281012U JP16989975U JP16989975U JPS5281012U JP S5281012 U JPS5281012 U JP S5281012U JP 16989975 U JP16989975 U JP 16989975U JP 16989975 U JP16989975 U JP 16989975U JP S5281012 U JPS5281012 U JP S5281012U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16989975U JPS5654685Y2 (en) | 1975-12-13 | 1975-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16989975U JPS5654685Y2 (en) | 1975-12-13 | 1975-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5281012U true JPS5281012U (en) | 1977-06-16 |
| JPS5654685Y2 JPS5654685Y2 (en) | 1981-12-19 |
Family
ID=28648435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16989975U Expired JPS5654685Y2 (en) | 1975-12-13 | 1975-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5654685Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6981811B2 (en) | 2017-08-25 | 2021-12-17 | 株式会社ニューフレアテクノロジー | Pattern inspection device and pattern inspection method |
-
1975
- 1975-12-13 JP JP16989975U patent/JPS5654685Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5654685Y2 (en) | 1981-12-19 |