JPS5654478B2 - - Google Patents
Info
- Publication number
- JPS5654478B2 JPS5654478B2 JP8774773A JP8774773A JPS5654478B2 JP S5654478 B2 JPS5654478 B2 JP S5654478B2 JP 8774773 A JP8774773 A JP 8774773A JP 8774773 A JP8774773 A JP 8774773A JP S5654478 B2 JPS5654478 B2 JP S5654478B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8774773A JPS5654478B2 (enExample) | 1973-08-04 | 1973-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8774773A JPS5654478B2 (enExample) | 1973-08-04 | 1973-08-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5037007A JPS5037007A (enExample) | 1975-04-07 |
| JPS5654478B2 true JPS5654478B2 (enExample) | 1981-12-25 |
Family
ID=13923511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8774773A Expired JPS5654478B2 (enExample) | 1973-08-04 | 1973-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5654478B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63200171U (enExample) * | 1987-06-08 | 1988-12-23 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7220580B2 (ja) * | 2019-02-08 | 2023-02-10 | 東京エレクトロン株式会社 | チューブ体及びポンプ装置 |
-
1973
- 1973-08-04 JP JP8774773A patent/JPS5654478B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63200171U (enExample) * | 1987-06-08 | 1988-12-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5037007A (enExample) | 1975-04-07 |