JPS5653768B2 - - Google Patents

Info

Publication number
JPS5653768B2
JPS5653768B2 JP4942572A JP4942572A JPS5653768B2 JP S5653768 B2 JPS5653768 B2 JP S5653768B2 JP 4942572 A JP4942572 A JP 4942572A JP 4942572 A JP4942572 A JP 4942572A JP S5653768 B2 JPS5653768 B2 JP S5653768B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4942572A
Other languages
Japanese (ja)
Other versions
JPS4915356A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4942572A priority Critical patent/JPS5653768B2/ja
Publication of JPS4915356A publication Critical patent/JPS4915356A/ja
Publication of JPS5653768B2 publication Critical patent/JPS5653768B2/ja
Expired legal-status Critical Current

Links

JP4942572A 1972-05-18 1972-05-18 Expired JPS5653768B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4942572A JPS5653768B2 (de) 1972-05-18 1972-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4942572A JPS5653768B2 (de) 1972-05-18 1972-05-18

Publications (2)

Publication Number Publication Date
JPS4915356A JPS4915356A (de) 1974-02-09
JPS5653768B2 true JPS5653768B2 (de) 1981-12-21

Family

ID=12830721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4942572A Expired JPS5653768B2 (de) 1972-05-18 1972-05-18

Country Status (1)

Country Link
JP (1) JPS5653768B2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58124467U (ja) * 1982-02-17 1983-08-24 日本真空技術株式会社 真空蒸着装置
JPS60215540A (ja) * 1984-04-06 1985-10-28 Sumitomo Electric Ind Ltd 光フアイバ−用多孔質母材の製造装置
DE3707672A1 (de) * 1987-03-10 1988-09-22 Sitesa Sa Epitaxieanlage

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4123841Y1 (de) * 1966-03-14 1966-12-05
JPS4310241Y1 (de) * 1965-03-31 1968-05-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4310241Y1 (de) * 1965-03-31 1968-05-06
JPS4123841Y1 (de) * 1966-03-14 1966-12-05

Also Published As

Publication number Publication date
JPS4915356A (de) 1974-02-09

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