JPS5653733B2 - - Google Patents

Info

Publication number
JPS5653733B2
JPS5653733B2 JP6987678A JP6987678A JPS5653733B2 JP S5653733 B2 JPS5653733 B2 JP S5653733B2 JP 6987678 A JP6987678 A JP 6987678A JP 6987678 A JP6987678 A JP 6987678A JP S5653733 B2 JPS5653733 B2 JP S5653733B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6987678A
Other languages
Japanese (ja)
Other versions
JPS54161320A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6987678A priority Critical patent/JPS54161320A/en
Publication of JPS54161320A publication Critical patent/JPS54161320A/en
Publication of JPS5653733B2 publication Critical patent/JPS5653733B2/ja
Granted legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
JP6987678A 1978-06-12 1978-06-12 Production of cross linking type resist Granted JPS54161320A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6987678A JPS54161320A (en) 1978-06-12 1978-06-12 Production of cross linking type resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6987678A JPS54161320A (en) 1978-06-12 1978-06-12 Production of cross linking type resist

Publications (2)

Publication Number Publication Date
JPS54161320A JPS54161320A (en) 1979-12-20
JPS5653733B2 true JPS5653733B2 (en) 1981-12-21

Family

ID=13415412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6987678A Granted JPS54161320A (en) 1978-06-12 1978-06-12 Production of cross linking type resist

Country Status (1)

Country Link
JP (1) JPS54161320A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178324U (en) * 1983-05-13 1984-11-29 株式会社　フエニツクス hat with pocket

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49103632A (en) * 1972-12-21 1974-10-01 Philips Nv
JPS5466829A (en) * 1977-11-07 1979-05-29 Fujitsu Ltd Pattern formation materil
JPS5466776A (en) * 1977-11-07 1979-05-29 Fujitsu Ltd Fine pattern forming method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49103632A (en) * 1972-12-21 1974-10-01 Philips Nv
US3981985A (en) * 1972-12-21 1976-09-21 U.S. Philips Corporation Positive-working electron resists
JPS5466829A (en) * 1977-11-07 1979-05-29 Fujitsu Ltd Pattern formation materil
JPS5466776A (en) * 1977-11-07 1979-05-29 Fujitsu Ltd Fine pattern forming method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178324U (en) * 1983-05-13 1984-11-29 株式会社　フエニツクス hat with pocket

Also Published As

Publication number Publication date
JPS54161320A (en) 1979-12-20

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