JPS5652453B2 - - Google Patents
Info
- Publication number
- JPS5652453B2 JPS5652453B2 JP5531073A JP5531073A JPS5652453B2 JP S5652453 B2 JPS5652453 B2 JP S5652453B2 JP 5531073 A JP5531073 A JP 5531073A JP 5531073 A JP5531073 A JP 5531073A JP S5652453 B2 JPS5652453 B2 JP S5652453B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5531073A JPS5652453B2 (xx) | 1973-05-18 | 1973-05-18 | |
| US05/451,383 US3966501A (en) | 1973-03-23 | 1974-03-14 | Process of producing semiconductor devices |
| DE2414033A DE2414033C3 (de) | 1973-03-23 | 1974-03-22 | Verfahren zur Herstellung von Halbleitervorrichtungen mit selektiv auf einer Oberfläche eines Halbleitersubstrats angeordneten Schichten aus einem Oxid des Substratmaterials |
| NL7403940.A NL161302C (nl) | 1973-03-23 | 1974-03-22 | Werkwijze voor het vervaardigen van een halfgeleiderin- richting. |
| FR7409931A FR2222754B1 (xx) | 1973-03-23 | 1974-03-22 | |
| GB1317974A GB1469436A (en) | 1973-03-23 | 1974-03-25 | Process for producing semiconductor devices |
| IT20903/74A IT1007685B (it) | 1973-03-23 | 1974-04-08 | Procedimento per la produzione di dispositivi semiconduttori |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5531073A JPS5652453B2 (xx) | 1973-05-18 | 1973-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS507482A JPS507482A (xx) | 1975-01-25 |
| JPS5652453B2 true JPS5652453B2 (xx) | 1981-12-12 |
Family
ID=12994980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5531073A Expired JPS5652453B2 (xx) | 1973-03-23 | 1973-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5652453B2 (xx) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4157268A (en) * | 1977-06-16 | 1979-06-05 | International Business Machines Corporation | Localized oxidation enhancement for an integrated injection logic circuit |
| JPS61198646A (ja) * | 1985-02-27 | 1986-09-03 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
-
1973
- 1973-05-18 JP JP5531073A patent/JPS5652453B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS507482A (xx) | 1975-01-25 |