JPS5652182Y2 - - Google Patents
Info
- Publication number
- JPS5652182Y2 JPS5652182Y2 JP1978116941U JP11694178U JPS5652182Y2 JP S5652182 Y2 JPS5652182 Y2 JP S5652182Y2 JP 1978116941 U JP1978116941 U JP 1978116941U JP 11694178 U JP11694178 U JP 11694178U JP S5652182 Y2 JPS5652182 Y2 JP S5652182Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Special Conveying (AREA)
- Attitude Control For Articles On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978116941U JPS5652182Y2 (show.php) | 1978-08-26 | 1978-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978116941U JPS5652182Y2 (show.php) | 1978-08-26 | 1978-08-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5535010U JPS5535010U (show.php) | 1980-03-06 |
| JPS5652182Y2 true JPS5652182Y2 (show.php) | 1981-12-05 |
Family
ID=29069933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978116941U Expired JPS5652182Y2 (show.php) | 1978-08-26 | 1978-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5652182Y2 (show.php) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51147967A (en) * | 1975-06-14 | 1976-12-18 | Fujitsu Ltd | Method of controlling spot exposure |
| JPS5946091B2 (ja) * | 1977-02-16 | 1984-11-10 | 日本電子株式会社 | 電子線露光装置 |
-
1978
- 1978-08-26 JP JP1978116941U patent/JPS5652182Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5535010U (show.php) | 1980-03-06 |