JPS565057B2 - - Google Patents
Info
- Publication number
- JPS565057B2 JPS565057B2 JP6292776A JP6292776A JPS565057B2 JP S565057 B2 JPS565057 B2 JP S565057B2 JP 6292776 A JP6292776 A JP 6292776A JP 6292776 A JP6292776 A JP 6292776A JP S565057 B2 JPS565057 B2 JP S565057B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6292776A JPS52147069A (en) | 1976-06-01 | 1976-06-01 | Production of high quality masks |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6292776A JPS52147069A (en) | 1976-06-01 | 1976-06-01 | Production of high quality masks |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52147069A JPS52147069A (en) | 1977-12-07 |
| JPS565057B2 true JPS565057B2 (en, 2012) | 1981-02-03 |
Family
ID=13214390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6292776A Granted JPS52147069A (en) | 1976-06-01 | 1976-06-01 | Production of high quality masks |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52147069A (en, 2012) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS501805A (en, 2012) * | 1973-05-14 | 1975-01-09 | ||
| JPS5011666A (en, 2012) * | 1973-06-01 | 1975-02-06 | ||
| JPS5160455A (en, 2012) * | 1974-11-22 | 1976-05-26 | Tokyo Shibaura Electric Co |
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1976
- 1976-06-01 JP JP6292776A patent/JPS52147069A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52147069A (en) | 1977-12-07 |