JPS56501785A - - Google Patents
Info
- Publication number
- JPS56501785A JPS56501785A JP50021081A JP50021081A JPS56501785A JP S56501785 A JPS56501785 A JP S56501785A JP 50021081 A JP50021081 A JP 50021081A JP 50021081 A JP50021081 A JP 50021081A JP S56501785 A JPS56501785 A JP S56501785A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P70/00—Cleaning of wafers, substrates or parts of devices
- H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/40—Fillings or auxiliary members in containers, e.g. centering rings
- H10W76/42—Fillings
- H10W76/48—Fillings including materials for absorbing or reacting with moisture or other undesired substances
Landscapes
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Drying Of Gases (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/092,695 US4280885A (en) | 1979-11-09 | 1979-11-09 | Method of and apparatus for active electro-chemical water and similar environmental contaminant elimination in semi-conductor and other electronic and electrical devices and the like |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56501785A true JPS56501785A (https=) | 1981-12-03 |
| JPS6119118B2 JPS6119118B2 (https=) | 1986-05-15 |
Family
ID=22234602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56500210A Expired JPS6119118B2 (https=) | 1979-11-09 | 1981-11-07 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4280885A (https=) |
| EP (1) | EP0043818A1 (https=) |
| JP (1) | JPS6119118B2 (https=) |
| CA (1) | CA1185920A (https=) |
| DE (1) | DE3050032C2 (https=) |
| GB (1) | GB2075064B (https=) |
| WO (1) | WO1981001423A1 (https=) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4622433A (en) * | 1984-03-30 | 1986-11-11 | Diacon, Inc. | Ceramic package system using low temperature sealing glasses |
| US4707244A (en) * | 1986-01-21 | 1987-11-17 | Beckman Industrial Corporation | Solid state sensor element |
| JPH03502488A (ja) * | 1988-02-08 | 1991-06-06 | ローズマウント インコ． | 薄膜水分検出素子およびその製造方法 |
| US4990236A (en) * | 1988-02-08 | 1991-02-05 | Rosemount Inc. | Thin film moisture sensing element |
| US4915816A (en) * | 1988-09-06 | 1990-04-10 | Parthasarathy Shakkottai | Polymer hygrometer for harsh environments |
| JP2978226B2 (ja) * | 1990-09-26 | 1999-11-15 | 三菱電機株式会社 | 半導体集積回路 |
| US5371178A (en) * | 1990-10-24 | 1994-12-06 | Johnson Matthey Inc. | Rapidly curing adhesive and method |
| US5386000A (en) * | 1990-10-24 | 1995-01-31 | Johnson Matthey Inc. | Low temperature flexible die attach adhesive and articles using same |
| US5250600A (en) * | 1992-05-28 | 1993-10-05 | Johnson Matthey Inc. | Low temperature flexible die attach adhesive and articles using same |
| IT1251763B (it) * | 1991-11-06 | 1995-05-23 | Getters Spa | Dispositivo per misurare con precisione la presenza di umidita' |
| US5524422A (en) * | 1992-02-28 | 1996-06-11 | Johnson Matthey Inc. | Materials with low moisture outgassing properties and method of reducing moisture content of hermetic packages containing semiconductor devices |
| US5195299B1 (en) * | 1992-02-28 | 1996-02-13 | Johnson Matthey Inc | Method of reducing moisture content of hermetic packages containing semiconductor devices |
| US5837935A (en) * | 1996-02-26 | 1998-11-17 | Ford Motor Company | Hermetic seal for an electronic component having a secondary chamber |
| ZA975891B (en) * | 1996-07-05 | 1998-07-23 | Combimatrix Corp | Electrochemical solid phase synthesis of polymers |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1677032A (en) * | 1926-11-09 | 1928-07-10 | Kaffer Joan Willem Jules | Electrical heating and cooking apparatus |
| US2351282A (en) * | 1940-04-27 | 1944-06-13 | Jr William Harold Oliver | Microscopic slide |
| US2816067A (en) * | 1955-05-03 | 1957-12-10 | Du Pont | Electrolytic drying method |
| US3240693A (en) * | 1961-08-28 | 1966-03-15 | Beckman Instruments Inc | Hygrometer |
| US3223609A (en) * | 1961-10-30 | 1965-12-14 | Beckman Instruments Inc | Hygrometer |
| US3923629A (en) * | 1974-03-25 | 1975-12-02 | Carborundum Co | Electrolytic cell for inactivation and destruction of pathogenic material |
| US4094751A (en) * | 1976-09-30 | 1978-06-13 | Allied Chemical Corporation | Photochemical diodes |
-
1979
- 1979-11-09 US US06/092,695 patent/US4280885A/en not_active Expired - Lifetime
-
1980
- 1980-11-07 GB GB8121344A patent/GB2075064B/en not_active Expired
- 1980-11-07 EP EP81900038A patent/EP0043818A1/en not_active Withdrawn
- 1980-11-07 WO PCT/US1980/001511 patent/WO1981001423A1/en not_active Ceased
- 1980-11-07 DE DE19803050032 patent/DE3050032C2/de not_active Expired
- 1980-11-10 CA CA000364373A patent/CA1185920A/en not_active Expired
-
1981
- 1981-11-07 JP JP56500210A patent/JPS6119118B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE3050032T1 (https=) | 1982-03-25 |
| WO1981001423A1 (en) | 1981-05-28 |
| US4280885A (en) | 1981-07-28 |
| EP0043818A1 (en) | 1982-01-20 |
| JPS6119118B2 (https=) | 1986-05-15 |
| CA1185920A (en) | 1985-04-23 |
| DE3050032C2 (de) | 1987-06-11 |
| GB2075064B (en) | 1983-10-12 |
| GB2075064A (en) | 1981-11-11 |