JPS5649929A - Inspecting method for precision of radiation rate correcting circuit of radiation thermometer - Google Patents

Inspecting method for precision of radiation rate correcting circuit of radiation thermometer

Info

Publication number
JPS5649929A
JPS5649929A JP12617279A JP12617279A JPS5649929A JP S5649929 A JPS5649929 A JP S5649929A JP 12617279 A JP12617279 A JP 12617279A JP 12617279 A JP12617279 A JP 12617279A JP S5649929 A JPS5649929 A JP S5649929A
Authority
JP
Japan
Prior art keywords
radiation
rate
transmitting
furnace
thermometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12617279A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Hokushin Electric Works Ltd
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hokushin Electric Works Ltd, Yokogawa Hokushin Electric Corp filed Critical Hokushin Electric Works Ltd
Priority to JP12617279A priority Critical patent/JPS5649929A/en
Publication of JPS5649929A publication Critical patent/JPS5649929A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer

Abstract

PURPOSE:To enable simple inspection of the precision of the radistion-rate correcting circuit for an optional radiation rate of providing a blackbody furnace and a correcting plate which transmits the radiant rays from the blackbody furnace corresponding to the radiation rate of an object of inspection. CONSTITUTION:The radiation thermometer 2 having a radiation-rate correcting circuit 20 is installed so that its visual field fits correctly to the range of the cavity part 10 of the blackbody furnace 1. In the passage of rays between the furnace 1 and the object lens 21 of the thermometer 2 is provided a correcting plate 3 controlling the radiation energy from the furnace 1. In this correcting plate 3 are formed a plurality of transmitting windows 30 transmitting radiant rays with uniform density, and the trnasmission rate of transmitting parts turns to be ''1'', while the transmission rate of nontransmitting parts turns to be ''0''. The ratio of the total sum of the area of the above transmitting ports 30 to the total area of the surface of the correcting plate 3 is set so as to be equal in value to the radiation rate epsilon of an object of inspection. The radiation energy transmitted by the correcting plate 3 becomes equivalent to the radiation energy from the radiant body with the radiation rate epsilon at the absolute temperature T. Transmitting rays are applied to the thermometer 2, the temperature indicated at this time is compared with the absolute temperature T of the blackbody furnace 1, and thereby the precision of the circuit 20 at the radiation rate epsilon can be known.
JP12617279A 1979-09-29 1979-09-29 Inspecting method for precision of radiation rate correcting circuit of radiation thermometer Pending JPS5649929A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12617279A JPS5649929A (en) 1979-09-29 1979-09-29 Inspecting method for precision of radiation rate correcting circuit of radiation thermometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12617279A JPS5649929A (en) 1979-09-29 1979-09-29 Inspecting method for precision of radiation rate correcting circuit of radiation thermometer

Publications (1)

Publication Number Publication Date
JPS5649929A true JPS5649929A (en) 1981-05-06

Family

ID=14928454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12617279A Pending JPS5649929A (en) 1979-09-29 1979-09-29 Inspecting method for precision of radiation rate correcting circuit of radiation thermometer

Country Status (1)

Country Link
JP (1) JPS5649929A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5762419A (en) * 1995-07-26 1998-06-09 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system
US5938335A (en) * 1996-04-08 1999-08-17 Applied Materials, Inc. Self-calibrating temperature probe
US6086245A (en) * 1995-07-26 2000-07-11 Applied Materials, Inc. Apparatus for infrared pyrometer calibration in a thermal processing system
US6179465B1 (en) 1996-03-28 2001-01-30 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system using multiple light sources
JP2015001388A (en) * 2013-06-13 2015-01-05 独立行政法人産業技術総合研究所 Calibration method of optical sensor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5762419A (en) * 1995-07-26 1998-06-09 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system
US6056433A (en) * 1995-07-26 2000-05-02 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system
US6086245A (en) * 1995-07-26 2000-07-11 Applied Materials, Inc. Apparatus for infrared pyrometer calibration in a thermal processing system
US6345909B1 (en) 1995-07-26 2002-02-12 Applied Materials, Inc. Apparatus for infrared pyrometer calibration in a thermal processing system
US6179465B1 (en) 1996-03-28 2001-01-30 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system using multiple light sources
KR100512191B1 (en) * 1996-03-28 2005-10-21 어플라이드 머티어리얼스, 인코포레이티드 Method and apparatus for calibrating a temperature probe in a thermal processing system
US5938335A (en) * 1996-04-08 1999-08-17 Applied Materials, Inc. Self-calibrating temperature probe
JP2015001388A (en) * 2013-06-13 2015-01-05 独立行政法人産業技術総合研究所 Calibration method of optical sensor

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