JPS5649444B2 - - Google Patents
Info
- Publication number
- JPS5649444B2 JPS5649444B2 JP13261576A JP13261576A JPS5649444B2 JP S5649444 B2 JPS5649444 B2 JP S5649444B2 JP 13261576 A JP13261576 A JP 13261576A JP 13261576 A JP13261576 A JP 13261576A JP S5649444 B2 JPS5649444 B2 JP S5649444B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13261576A JPS5357761A (en) | 1976-11-04 | 1976-11-04 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13261576A JPS5357761A (en) | 1976-11-04 | 1976-11-04 | Electron beam exposure apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5357761A JPS5357761A (en) | 1978-05-25 |
JPS5649444B2 true JPS5649444B2 (ko) | 1981-11-21 |
Family
ID=15085460
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13261576A Granted JPS5357761A (en) | 1976-11-04 | 1976-11-04 | Electron beam exposure apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5357761A (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6349448U (ko) * | 1986-09-18 | 1988-04-04 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52132783A (en) * | 1976-04-30 | 1977-11-07 | Jeol Ltd | Electron ray exposure unit |
-
1976
- 1976-11-04 JP JP13261576A patent/JPS5357761A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52132783A (en) * | 1976-04-30 | 1977-11-07 | Jeol Ltd | Electron ray exposure unit |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6349448U (ko) * | 1986-09-18 | 1988-04-04 |
Also Published As
Publication number | Publication date |
---|---|
JPS5357761A (en) | 1978-05-25 |