JPS5649444B2 - - Google Patents

Info

Publication number
JPS5649444B2
JPS5649444B2 JP13261576A JP13261576A JPS5649444B2 JP S5649444 B2 JPS5649444 B2 JP S5649444B2 JP 13261576 A JP13261576 A JP 13261576A JP 13261576 A JP13261576 A JP 13261576A JP S5649444 B2 JPS5649444 B2 JP S5649444B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13261576A
Other languages
Japanese (ja)
Other versions
JPS5357761A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13261576A priority Critical patent/JPS5357761A/ja
Publication of JPS5357761A publication Critical patent/JPS5357761A/ja
Publication of JPS5649444B2 publication Critical patent/JPS5649444B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP13261576A 1976-11-04 1976-11-04 Electron beam exposure apparatus Granted JPS5357761A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13261576A JPS5357761A (en) 1976-11-04 1976-11-04 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13261576A JPS5357761A (en) 1976-11-04 1976-11-04 Electron beam exposure apparatus

Publications (2)

Publication Number Publication Date
JPS5357761A JPS5357761A (en) 1978-05-25
JPS5649444B2 true JPS5649444B2 (OSRAM) 1981-11-21

Family

ID=15085460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13261576A Granted JPS5357761A (en) 1976-11-04 1976-11-04 Electron beam exposure apparatus

Country Status (1)

Country Link
JP (1) JPS5357761A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6349448U (OSRAM) * 1986-09-18 1988-04-04

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52132783A (en) * 1976-04-30 1977-11-07 Jeol Ltd Electron ray exposure unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6349448U (OSRAM) * 1986-09-18 1988-04-04

Also Published As

Publication number Publication date
JPS5357761A (en) 1978-05-25

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