JPS5648772Y2 - - Google Patents
Info
- Publication number
- JPS5648772Y2 JPS5648772Y2 JP1979018169U JP1816979U JPS5648772Y2 JP S5648772 Y2 JPS5648772 Y2 JP S5648772Y2 JP 1979018169 U JP1979018169 U JP 1979018169U JP 1816979 U JP1816979 U JP 1816979U JP S5648772 Y2 JPS5648772 Y2 JP S5648772Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Discharge Heating (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979018169U JPS5648772Y2 (en:Method) | 1979-02-14 | 1979-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979018169U JPS5648772Y2 (en:Method) | 1979-02-14 | 1979-02-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55119700U JPS55119700U (en:Method) | 1980-08-25 |
| JPS5648772Y2 true JPS5648772Y2 (en:Method) | 1981-11-13 |
Family
ID=28844922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979018169U Expired JPS5648772Y2 (en:Method) | 1979-02-14 | 1979-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5648772Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110225997A (zh) * | 2017-01-27 | 2019-09-10 | 超科技公司 | 具有用于基板偏置的ald的增强的电隔离的卡盘系统和方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5628206Y2 (en:Method) * | 1977-12-23 | 1981-07-04 |
-
1979
- 1979-02-14 JP JP1979018169U patent/JPS5648772Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55119700U (en:Method) | 1980-08-25 |