JPS55119700U - - Google Patents
Info
- Publication number
- JPS55119700U JPS55119700U JP1816979U JP1816979U JPS55119700U JP S55119700 U JPS55119700 U JP S55119700U JP 1816979 U JP1816979 U JP 1816979U JP 1816979 U JP1816979 U JP 1816979U JP S55119700 U JPS55119700 U JP S55119700U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Discharge Heating (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979018169U JPS5648772Y2 (en:Method) | 1979-02-14 | 1979-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979018169U JPS5648772Y2 (en:Method) | 1979-02-14 | 1979-02-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55119700U true JPS55119700U (en:Method) | 1980-08-25 |
| JPS5648772Y2 JPS5648772Y2 (en:Method) | 1981-11-13 |
Family
ID=28844922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979018169U Expired JPS5648772Y2 (en:Method) | 1979-02-14 | 1979-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5648772Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3574126A4 (en) * | 2017-01-27 | 2020-10-28 | Veeco Instruments Inc. | TIGHTENING SYSTEMS AND METHODS WITH IMPROVED ELECTRICAL INSULATION FOR SUBSTRATE POLARIZED ALD |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5498820U (en:Method) * | 1977-12-23 | 1979-07-12 |
-
1979
- 1979-02-14 JP JP1979018169U patent/JPS5648772Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5498820U (en:Method) * | 1977-12-23 | 1979-07-12 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3574126A4 (en) * | 2017-01-27 | 2020-10-28 | Veeco Instruments Inc. | TIGHTENING SYSTEMS AND METHODS WITH IMPROVED ELECTRICAL INSULATION FOR SUBSTRATE POLARIZED ALD |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5648772Y2 (en:Method) | 1981-11-13 |