JPS5647946Y2 - - Google Patents
Info
- Publication number
- JPS5647946Y2 JPS5647946Y2 JP1976159115U JP15911576U JPS5647946Y2 JP S5647946 Y2 JPS5647946 Y2 JP S5647946Y2 JP 1976159115 U JP1976159115 U JP 1976159115U JP 15911576 U JP15911576 U JP 15911576U JP S5647946 Y2 JPS5647946 Y2 JP S5647946Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976159115U JPS5647946Y2 (en:Method) | 1976-11-26 | 1976-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976159115U JPS5647946Y2 (en:Method) | 1976-11-26 | 1976-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5377672U JPS5377672U (en:Method) | 1978-06-28 |
| JPS5647946Y2 true JPS5647946Y2 (en:Method) | 1981-11-10 |
Family
ID=28767071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976159115U Expired JPS5647946Y2 (en:Method) | 1976-11-26 | 1976-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5647946Y2 (en:Method) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3729966A (en) * | 1972-02-02 | 1973-05-01 | Ibm | Apparatus for contouring the surface of thin elements |
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1976
- 1976-11-26 JP JP1976159115U patent/JPS5647946Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5377672U (en:Method) | 1978-06-28 |