JPS5377672U - - Google Patents

Info

Publication number
JPS5377672U
JPS5377672U JP15911576U JP15911576U JPS5377672U JP S5377672 U JPS5377672 U JP S5377672U JP 15911576 U JP15911576 U JP 15911576U JP 15911576 U JP15911576 U JP 15911576U JP S5377672 U JPS5377672 U JP S5377672U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15911576U
Other languages
Japanese (ja)
Other versions
JPS5647946Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976159115U priority Critical patent/JPS5647946Y2/ja
Publication of JPS5377672U publication Critical patent/JPS5377672U/ja
Application granted granted Critical
Publication of JPS5647946Y2 publication Critical patent/JPS5647946Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1976159115U 1976-11-26 1976-11-26 Expired JPS5647946Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976159115U JPS5647946Y2 (en:Method) 1976-11-26 1976-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976159115U JPS5647946Y2 (en:Method) 1976-11-26 1976-11-26

Publications (2)

Publication Number Publication Date
JPS5377672U true JPS5377672U (en:Method) 1978-06-28
JPS5647946Y2 JPS5647946Y2 (en:Method) 1981-11-10

Family

ID=28767071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976159115U Expired JPS5647946Y2 (en:Method) 1976-11-26 1976-11-26

Country Status (1)

Country Link
JP (1) JPS5647946Y2 (en:Method)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4888871A (en:Method) * 1972-02-02 1973-11-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4888871A (en:Method) * 1972-02-02 1973-11-21

Also Published As

Publication number Publication date
JPS5647946Y2 (en:Method) 1981-11-10

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