JPS5647694B2 - - Google Patents
Info
- Publication number
- JPS5647694B2 JPS5647694B2 JP12898177A JP12898177A JPS5647694B2 JP S5647694 B2 JPS5647694 B2 JP S5647694B2 JP 12898177 A JP12898177 A JP 12898177A JP 12898177 A JP12898177 A JP 12898177A JP S5647694 B2 JPS5647694 B2 JP S5647694B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12898177A JPS5461879A (en) | 1977-10-27 | 1977-10-27 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12898177A JPS5461879A (en) | 1977-10-27 | 1977-10-27 | Electron beam exposure apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5461879A JPS5461879A (en) | 1979-05-18 |
JPS5647694B2 true JPS5647694B2 (ja) | 1981-11-11 |
Family
ID=14998164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12898177A Granted JPS5461879A (en) | 1977-10-27 | 1977-10-27 | Electron beam exposure apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5461879A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5764393U (ja) * | 1980-10-02 | 1982-04-16 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5875746A (ja) * | 1981-10-30 | 1983-05-07 | Toshiba Corp | 荷電ビ−ム光学鏡筒 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5251871A (en) * | 1975-10-23 | 1977-04-26 | Rikagaku Kenkyusho | Projecting method for charge particle beams |
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1977
- 1977-10-27 JP JP12898177A patent/JPS5461879A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5251871A (en) * | 1975-10-23 | 1977-04-26 | Rikagaku Kenkyusho | Projecting method for charge particle beams |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5764393U (ja) * | 1980-10-02 | 1982-04-16 |
Also Published As
Publication number | Publication date |
---|---|
JPS5461879A (en) | 1979-05-18 |