JPS5647106Y2 - - Google Patents
Info
- Publication number
- JPS5647106Y2 JPS5647106Y2 JP1976083976U JP8397676U JPS5647106Y2 JP S5647106 Y2 JPS5647106 Y2 JP S5647106Y2 JP 1976083976 U JP1976083976 U JP 1976083976U JP 8397676 U JP8397676 U JP 8397676U JP S5647106 Y2 JPS5647106 Y2 JP S5647106Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976083976U JPS5647106Y2 (https=) | 1976-06-28 | 1976-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976083976U JPS5647106Y2 (https=) | 1976-06-28 | 1976-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS535279U JPS535279U (https=) | 1978-01-18 |
| JPS5647106Y2 true JPS5647106Y2 (https=) | 1981-11-04 |
Family
ID=28695713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976083976U Expired JPS5647106Y2 (https=) | 1976-06-28 | 1976-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5647106Y2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7447432B2 (ja) | 2019-11-05 | 2024-03-12 | 東京エレクトロン株式会社 | 基板を処理する装置、原料カートリッジ、基板を処理する方法、及び原料カートリッジを製造する方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS459315Y1 (https=) * | 1966-06-09 | 1970-05-01 | ||
| JPS5114248Y2 (https=) * | 1972-07-19 | 1976-04-15 | ||
| JPS5553139Y2 (https=) * | 1974-07-29 | 1980-12-09 |
-
1976
- 1976-06-28 JP JP1976083976U patent/JPS5647106Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS535279U (https=) | 1978-01-18 |