JPS5646630B2 - - Google Patents

Info

Publication number
JPS5646630B2
JPS5646630B2 JP9900976A JP9900976A JPS5646630B2 JP S5646630 B2 JPS5646630 B2 JP S5646630B2 JP 9900976 A JP9900976 A JP 9900976A JP 9900976 A JP9900976 A JP 9900976A JP S5646630 B2 JPS5646630 B2 JP S5646630B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9900976A
Other languages
Japanese (ja)
Other versions
JPS5324233A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9900976A priority Critical patent/JPS5324233A/ja
Publication of JPS5324233A publication Critical patent/JPS5324233A/ja
Publication of JPS5646630B2 publication Critical patent/JPS5646630B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP9900976A 1976-08-19 1976-08-19 Pattern examination system Granted JPS5324233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9900976A JPS5324233A (en) 1976-08-19 1976-08-19 Pattern examination system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9900976A JPS5324233A (en) 1976-08-19 1976-08-19 Pattern examination system

Publications (2)

Publication Number Publication Date
JPS5324233A JPS5324233A (en) 1978-03-06
JPS5646630B2 true JPS5646630B2 (enrdf_load_stackoverflow) 1981-11-04

Family

ID=14235068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9900976A Granted JPS5324233A (en) 1976-08-19 1976-08-19 Pattern examination system

Country Status (1)

Country Link
JP (1) JPS5324233A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4218698A (en) * 1978-03-13 1980-08-19 Rca Corporation TV Graphics and mixing control
US4392120A (en) * 1978-10-30 1983-07-05 A. Aoki & Associates Pattern inspection system
JPS593681B2 (ja) 1978-10-30 1984-01-25 富士通株式会社 パタ−ン検査方式
JPS5940106A (ja) * 1982-08-30 1984-03-05 Fujitsu Ltd トリガ信号発生装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3879131A (en) * 1974-02-06 1975-04-22 Bell Telephone Labor Inc Photomask inspection by real time diffraction pattern analysis

Also Published As

Publication number Publication date
JPS5324233A (en) 1978-03-06

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