JPS5646581B2 - - Google Patents
Info
- Publication number
- JPS5646581B2 JPS5646581B2 JP386976A JP386976A JPS5646581B2 JP S5646581 B2 JPS5646581 B2 JP S5646581B2 JP 386976 A JP386976 A JP 386976A JP 386976 A JP386976 A JP 386976A JP S5646581 B2 JPS5646581 B2 JP S5646581B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Macromonomer-Based Addition Polymer (AREA)
- Polymerisation Methods In General (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP386976A JPS5287038A (en) | 1976-01-16 | 1976-01-16 | Resist material for superfine processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP386976A JPS5287038A (en) | 1976-01-16 | 1976-01-16 | Resist material for superfine processing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5287038A JPS5287038A (en) | 1977-07-20 |
| JPS5646581B2 true JPS5646581B2 (forum.php) | 1981-11-04 |
Family
ID=11569187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP386976A Granted JPS5287038A (en) | 1976-01-16 | 1976-01-16 | Resist material for superfine processing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5287038A (forum.php) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5113517B2 (forum.php) * | 1973-08-28 | 1976-04-30 |
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1976
- 1976-01-16 JP JP386976A patent/JPS5287038A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5287038A (en) | 1977-07-20 |