JPS5287038A - Resist material for superfine processing - Google Patents

Resist material for superfine processing

Info

Publication number
JPS5287038A
JPS5287038A JP386976A JP386976A JPS5287038A JP S5287038 A JPS5287038 A JP S5287038A JP 386976 A JP386976 A JP 386976A JP 386976 A JP386976 A JP 386976A JP S5287038 A JPS5287038 A JP S5287038A
Authority
JP
Japan
Prior art keywords
resist material
superfine processing
superfine
processing
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP386976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5646581B2 (forum.php
Inventor
Koutarou Nagasawa
Hideo Ochi
Fujio Tanaka
Yoshimi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Somar Corp
Original Assignee
Somar Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Manufacturing Co Ltd filed Critical Somar Manufacturing Co Ltd
Priority to JP386976A priority Critical patent/JPS5287038A/ja
Publication of JPS5287038A publication Critical patent/JPS5287038A/ja
Publication of JPS5646581B2 publication Critical patent/JPS5646581B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Macromonomer-Based Addition Polymer (AREA)
  • Polymerisation Methods In General (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP386976A 1976-01-16 1976-01-16 Resist material for superfine processing Granted JPS5287038A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP386976A JPS5287038A (en) 1976-01-16 1976-01-16 Resist material for superfine processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP386976A JPS5287038A (en) 1976-01-16 1976-01-16 Resist material for superfine processing

Publications (2)

Publication Number Publication Date
JPS5287038A true JPS5287038A (en) 1977-07-20
JPS5646581B2 JPS5646581B2 (forum.php) 1981-11-04

Family

ID=11569187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP386976A Granted JPS5287038A (en) 1976-01-16 1976-01-16 Resist material for superfine processing

Country Status (1)

Country Link
JP (1) JPS5287038A (forum.php)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045087A (forum.php) * 1973-08-28 1975-04-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045087A (forum.php) * 1973-08-28 1975-04-22

Also Published As

Publication number Publication date
JPS5646581B2 (forum.php) 1981-11-04

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