JPS5646581B2 - - Google Patents

Info

Publication number
JPS5646581B2
JPS5646581B2 JP386976A JP386976A JPS5646581B2 JP S5646581 B2 JPS5646581 B2 JP S5646581B2 JP 386976 A JP386976 A JP 386976A JP 386976 A JP386976 A JP 386976A JP S5646581 B2 JPS5646581 B2 JP S5646581B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP386976A
Other languages
Japanese (ja)
Other versions
JPS5287038A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP386976A priority Critical patent/JPS5287038A/ja
Publication of JPS5287038A publication Critical patent/JPS5287038A/ja
Publication of JPS5646581B2 publication Critical patent/JPS5646581B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polymerisation Methods In General (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
JP386976A 1976-01-16 1976-01-16 Resist material for superfine processing Granted JPS5287038A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP386976A JPS5287038A (en) 1976-01-16 1976-01-16 Resist material for superfine processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP386976A JPS5287038A (en) 1976-01-16 1976-01-16 Resist material for superfine processing

Publications (2)

Publication Number Publication Date
JPS5287038A JPS5287038A (en) 1977-07-20
JPS5646581B2 true JPS5646581B2 (enrdf_load_stackoverflow) 1981-11-04

Family

ID=11569187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP386976A Granted JPS5287038A (en) 1976-01-16 1976-01-16 Resist material for superfine processing

Country Status (1)

Country Link
JP (1) JPS5287038A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5113517B2 (enrdf_load_stackoverflow) * 1973-08-28 1976-04-30

Also Published As

Publication number Publication date
JPS5287038A (en) 1977-07-20

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