JPS5287038A - Resist material for superfine processing - Google Patents

Resist material for superfine processing

Info

Publication number
JPS5287038A
JPS5287038A JP386976A JP386976A JPS5287038A JP S5287038 A JPS5287038 A JP S5287038A JP 386976 A JP386976 A JP 386976A JP 386976 A JP386976 A JP 386976A JP S5287038 A JPS5287038 A JP S5287038A
Authority
JP
Japan
Prior art keywords
resist material
superfine processing
superfine
processing
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP386976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5646581B2 (enrdf_load_stackoverflow
Inventor
Koutarou Nagasawa
Hideo Ochi
Fujio Tanaka
Yoshimi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Somar Corp
Original Assignee
Somar Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Manufacturing Co Ltd filed Critical Somar Manufacturing Co Ltd
Priority to JP386976A priority Critical patent/JPS5287038A/ja
Publication of JPS5287038A publication Critical patent/JPS5287038A/ja
Publication of JPS5646581B2 publication Critical patent/JPS5646581B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polymerisation Methods In General (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
JP386976A 1976-01-16 1976-01-16 Resist material for superfine processing Granted JPS5287038A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP386976A JPS5287038A (en) 1976-01-16 1976-01-16 Resist material for superfine processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP386976A JPS5287038A (en) 1976-01-16 1976-01-16 Resist material for superfine processing

Publications (2)

Publication Number Publication Date
JPS5287038A true JPS5287038A (en) 1977-07-20
JPS5646581B2 JPS5646581B2 (enrdf_load_stackoverflow) 1981-11-04

Family

ID=11569187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP386976A Granted JPS5287038A (en) 1976-01-16 1976-01-16 Resist material for superfine processing

Country Status (1)

Country Link
JP (1) JPS5287038A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045087A (enrdf_load_stackoverflow) * 1973-08-28 1975-04-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045087A (enrdf_load_stackoverflow) * 1973-08-28 1975-04-22

Also Published As

Publication number Publication date
JPS5646581B2 (enrdf_load_stackoverflow) 1981-11-04

Similar Documents

Publication Publication Date Title
JPS5254503A (en) Photoosensitive copying material
JPS52104592A (en) Photopolymerizable material
JPS53254A (en) Ionized cellulose material
JPS5326995A (en) Highhmolecular piezooelectric material
JPS52123240A (en) Copying machine
JPS5344441A (en) Material for resist
JPS52117639A (en) Copying machine
JPS5345662A (en) Sheped material forming machine
JPS52150486A (en) Material treating apparatus
JPS52143919A (en) Investment material
JPS52127340A (en) Copying machine
JPS52152204A (en) Copying machine
JPS5357118A (en) Magnetic material
GB1558226A (en) Devices for treating gaseous material
JPS5296029A (en) Copying machine
JPS5360640A (en) Copying machine
JPS52119324A (en) Copying machine
JPS5287038A (en) Resist material for superfine processing
JPS52135100A (en) Electriccinsulating material
GB1552405A (en) Magnetisable material
JPS5299826A (en) Electronic copying machine
JPS5252704A (en) Photoosensitive copying material
JPS52136400A (en) Electriccinsulating material
JPS52115971A (en) Selfflubricating material
JPS5359504A (en) Positive photoresist material