JPS5646256B2 - - Google Patents
Info
- Publication number
- JPS5646256B2 JPS5646256B2 JP6365277A JP6365277A JPS5646256B2 JP S5646256 B2 JPS5646256 B2 JP S5646256B2 JP 6365277 A JP6365277 A JP 6365277A JP 6365277 A JP6365277 A JP 6365277A JP S5646256 B2 JPS5646256 B2 JP S5646256B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6365277A JPS53148393A (en) | 1977-05-31 | 1977-05-31 | Positioning method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6365277A JPS53148393A (en) | 1977-05-31 | 1977-05-31 | Positioning method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53148393A JPS53148393A (en) | 1978-12-23 |
JPS5646256B2 true JPS5646256B2 (ja) | 1981-10-31 |
Family
ID=13235486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6365277A Granted JPS53148393A (en) | 1977-05-31 | 1977-05-31 | Positioning method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53148393A (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57106130A (en) * | 1980-12-24 | 1982-07-01 | Jeol Ltd | Detecting method for mark |
JPS57119672U (ja) * | 1981-01-21 | 1982-07-24 | ||
US4546260A (en) * | 1983-06-30 | 1985-10-08 | International Business Machines Corporation | Alignment technique |
FR2598218A1 (fr) * | 1986-04-30 | 1987-11-06 | Commissariat Energie Atomique | Capteur de mesure lineaire sans contact de la distance d'une cible par rayonnement retrodiffuse |
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1977
- 1977-05-31 JP JP6365277A patent/JPS53148393A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS53148393A (en) | 1978-12-23 |