JPS5645892A - Manufacture of compound single crystal - Google Patents
Manufacture of compound single crystalInfo
- Publication number
- JPS5645892A JPS5645892A JP12061879A JP12061879A JPS5645892A JP S5645892 A JPS5645892 A JP S5645892A JP 12061879 A JP12061879 A JP 12061879A JP 12061879 A JP12061879 A JP 12061879A JP S5645892 A JPS5645892 A JP S5645892A
- Authority
- JP
- Japan
- Prior art keywords
- liq
- diameter
- crystal
- single crystal
- buoyancy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To manufacture a compound single crystal with high crystallizability and a slight diameter change by a liq. capsule pulling method by correcting the influence of buoyancy with a liq. capsule in automatic diameter control by a weight method.
CONSTITUTION: The weight of a high decomposition pressure compound single crystal pulled up with liq. capsule pulling device 1 is detected with weight detector 2, and the signal from detector 2 is differentiated with differentiator 3. This value and a buoyancy correcting signal from buoyancy collector 4 with a liq. capcule are inputted into automatic diameter controller 5 to control the diameter of the pulled crystal to a desired value. Thus, accuracy in the diameter of the pulled crystal can be enhanced, and a strain in the crystal can be reduced.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12061879A JPS5645892A (en) | 1979-09-21 | 1979-09-21 | Manufacture of compound single crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12061879A JPS5645892A (en) | 1979-09-21 | 1979-09-21 | Manufacture of compound single crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5645892A true JPS5645892A (en) | 1981-04-25 |
Family
ID=14790692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12061879A Pending JPS5645892A (en) | 1979-09-21 | 1979-09-21 | Manufacture of compound single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5645892A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4565598A (en) * | 1982-01-04 | 1986-01-21 | The Commonwealth Of Australia | Method and apparatus for controlling diameter in Czochralski crystal growth by measuring crystal weight and crystal-melt interface temperature |
JPS6374996A (en) * | 1986-09-19 | 1988-04-05 | Nippon Mining Co Ltd | Production of compound semiconductor single crystal |
-
1979
- 1979-09-21 JP JP12061879A patent/JPS5645892A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4565598A (en) * | 1982-01-04 | 1986-01-21 | The Commonwealth Of Australia | Method and apparatus for controlling diameter in Czochralski crystal growth by measuring crystal weight and crystal-melt interface temperature |
JPS6374996A (en) * | 1986-09-19 | 1988-04-05 | Nippon Mining Co Ltd | Production of compound semiconductor single crystal |
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