JPS5644149B2 - - Google Patents
Info
- Publication number
- JPS5644149B2 JPS5644149B2 JP2543074A JP2543074A JPS5644149B2 JP S5644149 B2 JPS5644149 B2 JP S5644149B2 JP 2543074 A JP2543074 A JP 2543074A JP 2543074 A JP2543074 A JP 2543074A JP S5644149 B2 JPS5644149 B2 JP S5644149B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2543074A JPS5644149B2 (https=) | 1974-03-04 | 1974-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2543074A JPS5644149B2 (https=) | 1974-03-04 | 1974-03-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50118978A JPS50118978A (https=) | 1975-09-18 |
| JPS5644149B2 true JPS5644149B2 (https=) | 1981-10-17 |
Family
ID=12165742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2543074A Expired JPS5644149B2 (https=) | 1974-03-04 | 1974-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5644149B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55110126A (en) * | 1979-02-16 | 1980-08-25 | Seiko Epson Corp | Preparation of antireflection film |
| JPS5913067A (ja) * | 1982-07-13 | 1984-01-23 | Matsushita Electric Ind Co Ltd | 薄膜生成方法 |
-
1974
- 1974-03-04 JP JP2543074A patent/JPS5644149B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50118978A (https=) | 1975-09-18 |