JPS564387A - Charge particle beam device - Google Patents

Charge particle beam device

Info

Publication number
JPS564387A
JPS564387A JP8036579A JP8036579A JPS564387A JP S564387 A JPS564387 A JP S564387A JP 8036579 A JP8036579 A JP 8036579A JP 8036579 A JP8036579 A JP 8036579A JP S564387 A JPS564387 A JP S564387A
Authority
JP
Japan
Prior art keywords
source
welding
signal
welding depth
becomes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8036579A
Other languages
Japanese (ja)
Inventor
Yoichi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP8036579A priority Critical patent/JPS564387A/en
Publication of JPS564387A publication Critical patent/JPS564387A/en
Pending legal-status Critical Current

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  • Welding Or Cutting Using Electron Beams (AREA)

Abstract

PURPOSE: To maintain welding depth constant and make welding strength even and sufficient by feeding the output signal of a detector which detects infrared rays generated in the material surface on the opposite side through projection of charge particle beams to the material, back to the charge particle beam generating source.
CONSTITUTION: Electric current is supplied to a filament 1 by a filament electric power source 2 to let electrons be generated. These are then projected as an electron beam 8 to the materials 9 to be welded to let heat be evolved so that the surrounding metal is melted by this heat and welding is thus accomplished. The deeper the welding depth becomes, the higher the temperature near the P point becomes and the larger the infrared ray amount emitted from the portion near the P point becomes, resulting in increased output signal from an infrared ray detector 11, but when the signal amount supplied to a differential amplifier 13 becomes larger than the reference signal from a reference signal source 14, the electric source 4 is so controlled that the signal of the amplifier 13 being fed back to the electric source 4 increases grid voltage, by which the electric current of the electron beam 8 is decreases and the welding depth is controlled in the decreasing direction. In this way, the welding depth is maintained always constant.
COPYRIGHT: (C)1981,JPO&Japio
JP8036579A 1979-06-26 1979-06-26 Charge particle beam device Pending JPS564387A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8036579A JPS564387A (en) 1979-06-26 1979-06-26 Charge particle beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8036579A JPS564387A (en) 1979-06-26 1979-06-26 Charge particle beam device

Publications (1)

Publication Number Publication Date
JPS564387A true JPS564387A (en) 1981-01-17

Family

ID=13716226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8036579A Pending JPS564387A (en) 1979-06-26 1979-06-26 Charge particle beam device

Country Status (1)

Country Link
JP (1) JPS564387A (en)

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