JPS5643158B2 - - Google Patents

Info

Publication number
JPS5643158B2
JPS5643158B2 JP2050476A JP2050476A JPS5643158B2 JP S5643158 B2 JPS5643158 B2 JP S5643158B2 JP 2050476 A JP2050476 A JP 2050476A JP 2050476 A JP2050476 A JP 2050476A JP S5643158 B2 JPS5643158 B2 JP S5643158B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2050476A
Other languages
Japanese (ja)
Other versions
JPS52103595A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2050476A priority Critical patent/JPS52103595A/ja
Publication of JPS52103595A publication Critical patent/JPS52103595A/ja
Publication of JPS5643158B2 publication Critical patent/JPS5643158B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dry Formation Of Fiberboard And The Like (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Treatments For Attaching Organic Compounds To Fibrous Goods (AREA)
  • Paper (AREA)
  • Chemical And Physical Treatments For Wood And The Like (AREA)
JP2050476A 1976-02-26 1976-02-26 Imparting method of water repelency Granted JPS52103595A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2050476A JPS52103595A (en) 1976-02-26 1976-02-26 Imparting method of water repelency

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2050476A JPS52103595A (en) 1976-02-26 1976-02-26 Imparting method of water repelency

Publications (2)

Publication Number Publication Date
JPS52103595A JPS52103595A (en) 1977-08-30
JPS5643158B2 true JPS5643158B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-10-09

Family

ID=12028978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2050476A Granted JPS52103595A (en) 1976-02-26 1976-02-26 Imparting method of water repelency

Country Status (1)

Country Link
JP (1) JPS52103595A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842235A (ja) * 1981-09-08 1983-03-11 Toshiba Corp 半導体乾式エツチング装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05220715A (ja) * 1990-03-29 1993-08-31 Mokuzai Seinou Kojo Gijutsu Kenkyu Kumiai 改良木質ボードの製造方法
JP5064296B2 (ja) * 2008-05-21 2012-10-31 東京エレクトロン株式会社 シリコン炭窒化膜の形成方法および形成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842235A (ja) * 1981-09-08 1983-03-11 Toshiba Corp 半導体乾式エツチング装置

Also Published As

Publication number Publication date
JPS52103595A (en) 1977-08-30

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