JPS5643113B2 - - Google Patents

Info

Publication number
JPS5643113B2
JPS5643113B2 JP1052776A JP1052776A JPS5643113B2 JP S5643113 B2 JPS5643113 B2 JP S5643113B2 JP 1052776 A JP1052776 A JP 1052776A JP 1052776 A JP1052776 A JP 1052776A JP S5643113 B2 JPS5643113 B2 JP S5643113B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1052776A
Other languages
Japanese (ja)
Other versions
JPS5293640A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1052776A priority Critical patent/JPS5293640A/ja
Publication of JPS5293640A publication Critical patent/JPS5293640A/ja
Publication of JPS5643113B2 publication Critical patent/JPS5643113B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1052776A 1976-02-03 1976-02-03 Plasm etching method Granted JPS5293640A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1052776A JPS5293640A (en) 1976-02-03 1976-02-03 Plasm etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1052776A JPS5293640A (en) 1976-02-03 1976-02-03 Plasm etching method

Publications (2)

Publication Number Publication Date
JPS5293640A JPS5293640A (en) 1977-08-06
JPS5643113B2 true JPS5643113B2 (enrdf_load_html_response) 1981-10-09

Family

ID=11752714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1052776A Granted JPS5293640A (en) 1976-02-03 1976-02-03 Plasm etching method

Country Status (1)

Country Link
JP (1) JPS5293640A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3376186D1 (en) * 1983-08-02 1988-05-05 Ibm Deutschland Dry-etching process and its use

Also Published As

Publication number Publication date
JPS5293640A (en) 1977-08-06

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