JPS5643113B2 - - Google Patents
Info
- Publication number
- JPS5643113B2 JPS5643113B2 JP1052776A JP1052776A JPS5643113B2 JP S5643113 B2 JPS5643113 B2 JP S5643113B2 JP 1052776 A JP1052776 A JP 1052776A JP 1052776 A JP1052776 A JP 1052776A JP S5643113 B2 JPS5643113 B2 JP S5643113B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1052776A JPS5293640A (en) | 1976-02-03 | 1976-02-03 | Plasm etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1052776A JPS5293640A (en) | 1976-02-03 | 1976-02-03 | Plasm etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5293640A JPS5293640A (en) | 1977-08-06 |
| JPS5643113B2 true JPS5643113B2 (cs) | 1981-10-09 |
Family
ID=11752714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1052776A Granted JPS5293640A (en) | 1976-02-03 | 1976-02-03 | Plasm etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5293640A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3376186D1 (en) * | 1983-08-02 | 1988-05-05 | Ibm Deutschland | Dry-etching process and its use |
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1976
- 1976-02-03 JP JP1052776A patent/JPS5293640A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5293640A (en) | 1977-08-06 |