JPS5642138B2 - - Google Patents

Info

Publication number
JPS5642138B2
JPS5642138B2 JP7693576A JP7693576A JPS5642138B2 JP S5642138 B2 JPS5642138 B2 JP S5642138B2 JP 7693576 A JP7693576 A JP 7693576A JP 7693576 A JP7693576 A JP 7693576A JP S5642138 B2 JPS5642138 B2 JP S5642138B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7693576A
Other languages
Japanese (ja)
Other versions
JPS532074A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7693576A priority Critical patent/JPS532074A/ja
Publication of JPS532074A publication Critical patent/JPS532074A/ja
Publication of JPS5642138B2 publication Critical patent/JPS5642138B2/ja
Granted legal-status Critical Current

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  • Dicing (AREA)
JP7693576A 1976-06-28 1976-06-28 Scribing method for semiconductor wafer Granted JPS532074A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7693576A JPS532074A (en) 1976-06-28 1976-06-28 Scribing method for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7693576A JPS532074A (en) 1976-06-28 1976-06-28 Scribing method for semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS532074A JPS532074A (en) 1978-01-10
JPS5642138B2 true JPS5642138B2 (de) 1981-10-02

Family

ID=13619575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7693576A Granted JPS532074A (en) 1976-06-28 1976-06-28 Scribing method for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS532074A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6152938U (de) * 1984-09-11 1986-04-09

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7772090B2 (en) * 2003-09-30 2010-08-10 Intel Corporation Methods for laser scribing wafers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6152938U (de) * 1984-09-11 1986-04-09

Also Published As

Publication number Publication date
JPS532074A (en) 1978-01-10

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