JPS5640986B2 - - Google Patents

Info

Publication number
JPS5640986B2
JPS5640986B2 JP12624472A JP12624472A JPS5640986B2 JP S5640986 B2 JPS5640986 B2 JP S5640986B2 JP 12624472 A JP12624472 A JP 12624472A JP 12624472 A JP12624472 A JP 12624472A JP S5640986 B2 JPS5640986 B2 JP S5640986B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12624472A
Other versions
JPS4984377A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12624472A priority Critical patent/JPS5640986B2/ja
Publication of JPS4984377A publication Critical patent/JPS4984377A/ja
Publication of JPS5640986B2 publication Critical patent/JPS5640986B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Drying Of Semiconductors (AREA)
JP12624472A 1972-12-18 1972-12-18 Expired JPS5640986B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12624472A JPS5640986B2 (ja) 1972-12-18 1972-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12624472A JPS5640986B2 (ja) 1972-12-18 1972-12-18

Publications (2)

Publication Number Publication Date
JPS4984377A JPS4984377A (ja) 1974-08-13
JPS5640986B2 true JPS5640986B2 (ja) 1981-09-25

Family

ID=14930350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12624472A Expired JPS5640986B2 (ja) 1972-12-18 1972-12-18

Country Status (1)

Country Link
JP (1) JPS5640986B2 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5895869A (ja) * 1981-11-30 1983-06-07 Mitsubishi Electric Corp シヨツトキバリア形電界効果トランジスタの製造方法
JPS6197835A (ja) * 1984-10-18 1986-05-16 Matsushita Electronics Corp エッチング液の検査方法
US20140131707A1 (en) * 2011-11-14 2014-05-15 Fuji Electric Co., Ltd. Method and device for detecting termination of etching

Also Published As

Publication number Publication date
JPS4984377A (ja) 1974-08-13

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