JPS5640970B2 - - Google Patents

Info

Publication number
JPS5640970B2
JPS5640970B2 JP4581175A JP4581175A JPS5640970B2 JP S5640970 B2 JPS5640970 B2 JP S5640970B2 JP 4581175 A JP4581175 A JP 4581175A JP 4581175 A JP4581175 A JP 4581175A JP S5640970 B2 JPS5640970 B2 JP S5640970B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4581175A
Other languages
Japanese (ja)
Other versions
JPS51121252A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4581175A priority Critical patent/JPS51121252A/en
Publication of JPS51121252A publication Critical patent/JPS51121252A/en
Publication of JPS5640970B2 publication Critical patent/JPS5640970B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
JP4581175A 1975-04-17 1975-04-17 Semiconductor wafer processing method Granted JPS51121252A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4581175A JPS51121252A (en) 1975-04-17 1975-04-17 Semiconductor wafer processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4581175A JPS51121252A (en) 1975-04-17 1975-04-17 Semiconductor wafer processing method

Publications (2)

Publication Number Publication Date
JPS51121252A JPS51121252A (en) 1976-10-23
JPS5640970B2 true JPS5640970B2 (en) 1981-09-25

Family

ID=12729626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4581175A Granted JPS51121252A (en) 1975-04-17 1975-04-17 Semiconductor wafer processing method

Country Status (1)

Country Link
JP (1) JPS51121252A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0335741Y2 (en) * 1983-11-22 1991-07-29

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451397A (en) * 1977-09-29 1979-04-23 Kinsekisha Lab Ltd Method of working piezooelectric plate
EP0180430A3 (en) * 1984-10-25 1988-01-13 Tandem Computers Incorporated A process of reducing a wafer size

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0335741Y2 (en) * 1983-11-22 1991-07-29

Also Published As

Publication number Publication date
JPS51121252A (en) 1976-10-23

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