JPS5640658U - - Google Patents

Info

Publication number
JPS5640658U
JPS5640658U JP12276779U JP12276779U JPS5640658U JP S5640658 U JPS5640658 U JP S5640658U JP 12276779 U JP12276779 U JP 12276779U JP 12276779 U JP12276779 U JP 12276779U JP S5640658 U JPS5640658 U JP S5640658U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12276779U
Other languages
Japanese (ja)
Other versions
JPS5653545Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12276779U priority Critical patent/JPS5653545Y2/ja
Publication of JPS5640658U publication Critical patent/JPS5640658U/ja
Application granted granted Critical
Publication of JPS5653545Y2 publication Critical patent/JPS5653545Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP12276779U 1979-09-05 1979-09-05 Expired JPS5653545Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12276779U JPS5653545Y2 (en) 1979-09-05 1979-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12276779U JPS5653545Y2 (en) 1979-09-05 1979-09-05

Publications (2)

Publication Number Publication Date
JPS5640658U true JPS5640658U (en) 1981-04-15
JPS5653545Y2 JPS5653545Y2 (en) 1981-12-14

Family

ID=29354797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12276779U Expired JPS5653545Y2 (en) 1979-09-05 1979-09-05

Country Status (1)

Country Link
JP (1) JPS5653545Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60132470U (en) * 1984-02-15 1985-09-04 富士通株式会社 Molecular beam crystal growth equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60132470U (en) * 1984-02-15 1985-09-04 富士通株式会社 Molecular beam crystal growth equipment

Also Published As

Publication number Publication date
JPS5653545Y2 (en) 1981-12-14

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