JPS5640657U - - Google Patents
Info
- Publication number
- JPS5640657U JPS5640657U JP1979122629U JP12262979U JPS5640657U JP S5640657 U JPS5640657 U JP S5640657U JP 1979122629 U JP1979122629 U JP 1979122629U JP 12262979 U JP12262979 U JP 12262979U JP S5640657 U JPS5640657 U JP S5640657U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979122629U JPS5832267Y2 (ja) | 1979-09-05 | 1979-09-05 | 基板保持器用押上げ具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979122629U JPS5832267Y2 (ja) | 1979-09-05 | 1979-09-05 | 基板保持器用押上げ具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5640657U true JPS5640657U (enExample) | 1981-04-15 |
| JPS5832267Y2 JPS5832267Y2 (ja) | 1983-07-18 |
Family
ID=29354666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979122629U Expired JPS5832267Y2 (ja) | 1979-09-05 | 1979-09-05 | 基板保持器用押上げ具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5832267Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62179915U (enExample) * | 1986-05-07 | 1987-11-14 |
-
1979
- 1979-09-05 JP JP1979122629U patent/JPS5832267Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62179915U (enExample) * | 1986-05-07 | 1987-11-14 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5832267Y2 (ja) | 1983-07-18 |