JPS5638733U - - Google Patents

Info

Publication number
JPS5638733U
JPS5638733U JP11981879U JP11981879U JPS5638733U JP S5638733 U JPS5638733 U JP S5638733U JP 11981879 U JP11981879 U JP 11981879U JP 11981879 U JP11981879 U JP 11981879U JP S5638733 U JPS5638733 U JP S5638733U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11981879U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11981879U priority Critical patent/JPS5638733U/ja
Publication of JPS5638733U publication Critical patent/JPS5638733U/ja
Pending legal-status Critical Current

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  • Automatic Assembly (AREA)
JP11981879U 1979-08-30 1979-08-30 Pending JPS5638733U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11981879U JPS5638733U (ja) 1979-08-30 1979-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11981879U JPS5638733U (ja) 1979-08-30 1979-08-30

Publications (1)

Publication Number Publication Date
JPS5638733U true JPS5638733U (ja) 1981-04-11

Family

ID=29352015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11981879U Pending JPS5638733U (ja) 1979-08-30 1979-08-30

Country Status (1)

Country Link
JP (1) JPS5638733U (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59108622A (ja) * 1982-12-08 1984-06-23 Kanto Seiki Kk 工場に於ける自動ハンドリングシステム装置
JPS61206233A (ja) * 1985-03-09 1986-09-12 Oki Electric Ind Co Ltd 半導体製造装置のリ−ドフレ−ムフイ−ド機構
JPS63128704U (ja) * 1987-02-13 1988-08-23
JPH0563731U (ja) * 1991-12-13 1993-08-24 太陽誘電株式会社 物品供給装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59108622A (ja) * 1982-12-08 1984-06-23 Kanto Seiki Kk 工場に於ける自動ハンドリングシステム装置
JPS61206233A (ja) * 1985-03-09 1986-09-12 Oki Electric Ind Co Ltd 半導体製造装置のリ−ドフレ−ムフイ−ド機構
JPS63128704U (ja) * 1987-02-13 1988-08-23
JPH0563731U (ja) * 1991-12-13 1993-08-24 太陽誘電株式会社 物品供給装置

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