JPS5638449U - - Google Patents
Info
- Publication number
- JPS5638449U JPS5638449U JP12149979U JP12149979U JPS5638449U JP S5638449 U JPS5638449 U JP S5638449U JP 12149979 U JP12149979 U JP 12149979U JP 12149979 U JP12149979 U JP 12149979U JP S5638449 U JPS5638449 U JP S5638449U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979121499U JPS6350848Y2 (https=) | 1979-09-03 | 1979-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979121499U JPS6350848Y2 (https=) | 1979-09-03 | 1979-09-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5638449U true JPS5638449U (https=) | 1981-04-11 |
| JPS6350848Y2 JPS6350848Y2 (https=) | 1988-12-27 |
Family
ID=29353633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979121499U Expired JPS6350848Y2 (https=) | 1979-09-03 | 1979-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350848Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008277666A (ja) * | 2007-05-02 | 2008-11-13 | Tokyo Electron Ltd | バルブ開閉動作確認方法、ガス処理装置および記憶媒体 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5176976A (ja) * | 1974-12-27 | 1976-07-03 | Tokyo Shibaura Electric Co | Kisohannosochi |
| JPS54117177U (https=) * | 1978-01-31 | 1979-08-16 |
-
1979
- 1979-09-03 JP JP1979121499U patent/JPS6350848Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5176976A (ja) * | 1974-12-27 | 1976-07-03 | Tokyo Shibaura Electric Co | Kisohannosochi |
| JPS54117177U (https=) * | 1978-01-31 | 1979-08-16 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008277666A (ja) * | 2007-05-02 | 2008-11-13 | Tokyo Electron Ltd | バルブ開閉動作確認方法、ガス処理装置および記憶媒体 |
| WO2008136502A1 (ja) * | 2007-05-02 | 2008-11-13 | Tokyo Electron Limited | バルブ開閉動作確認方法、ガス処理装置および記憶媒体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6350848Y2 (https=) | 1988-12-27 |