JPS5638056B2 - - Google Patents

Info

Publication number
JPS5638056B2
JPS5638056B2 JP7083075A JP7083075A JPS5638056B2 JP S5638056 B2 JPS5638056 B2 JP S5638056B2 JP 7083075 A JP7083075 A JP 7083075A JP 7083075 A JP7083075 A JP 7083075A JP S5638056 B2 JPS5638056 B2 JP S5638056B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7083075A
Other languages
Japanese (ja)
Other versions
JPS522174A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7083075A priority Critical patent/JPS522174A/ja
Publication of JPS522174A publication Critical patent/JPS522174A/ja
Publication of JPS5638056B2 publication Critical patent/JPS5638056B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP7083075A 1975-06-13 1975-06-13 Self-matching etching process Granted JPS522174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7083075A JPS522174A (en) 1975-06-13 1975-06-13 Self-matching etching process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7083075A JPS522174A (en) 1975-06-13 1975-06-13 Self-matching etching process

Publications (2)

Publication Number Publication Date
JPS522174A JPS522174A (en) 1977-01-08
JPS5638056B2 true JPS5638056B2 (en, 2012) 1981-09-03

Family

ID=13442875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7083075A Granted JPS522174A (en) 1975-06-13 1975-06-13 Self-matching etching process

Country Status (1)

Country Link
JP (1) JPS522174A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62118055U (en, 2012) * 1985-10-04 1987-07-27
JPH038181U (en, 2012) * 1990-06-11 1991-01-25

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848936A (ja) * 1981-09-10 1983-03-23 Fujitsu Ltd 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529504B2 (en, 2012) * 1972-06-07 1977-03-16

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62118055U (en, 2012) * 1985-10-04 1987-07-27
JPH038181U (en, 2012) * 1990-06-11 1991-01-25

Also Published As

Publication number Publication date
JPS522174A (en) 1977-01-08

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