JPS5637562B2 - - Google Patents
Info
- Publication number
- JPS5637562B2 JPS5637562B2 JP9394875A JP9394875A JPS5637562B2 JP S5637562 B2 JPS5637562 B2 JP S5637562B2 JP 9394875 A JP9394875 A JP 9394875A JP 9394875 A JP9394875 A JP 9394875A JP S5637562 B2 JPS5637562 B2 JP S5637562B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Particle Accelerators (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Control Of Voltage And Current In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9394875A JPS5218598A (en) | 1975-08-01 | 1975-08-01 | Power source device for charged beam system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9394875A JPS5218598A (en) | 1975-08-01 | 1975-08-01 | Power source device for charged beam system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5218598A JPS5218598A (en) | 1977-02-12 |
| JPS5637562B2 true JPS5637562B2 (enExample) | 1981-09-01 |
Family
ID=14096648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9394875A Granted JPS5218598A (en) | 1975-08-01 | 1975-08-01 | Power source device for charged beam system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5218598A (enExample) |
-
1975
- 1975-08-01 JP JP9394875A patent/JPS5218598A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5218598A (en) | 1977-02-12 |