JPS5218598A - Power source device for charged beam system - Google Patents

Power source device for charged beam system

Info

Publication number
JPS5218598A
JPS5218598A JP9394875A JP9394875A JPS5218598A JP S5218598 A JPS5218598 A JP S5218598A JP 9394875 A JP9394875 A JP 9394875A JP 9394875 A JP9394875 A JP 9394875A JP S5218598 A JPS5218598 A JP S5218598A
Authority
JP
Japan
Prior art keywords
beam system
power source
source device
charged beam
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9394875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5637562B2 (enExample
Inventor
Kikuo Koga
Akio Fukui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP9394875A priority Critical patent/JPS5218598A/ja
Publication of JPS5218598A publication Critical patent/JPS5218598A/ja
Publication of JPS5637562B2 publication Critical patent/JPS5637562B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Control Of Voltage And Current In General (AREA)
JP9394875A 1975-08-01 1975-08-01 Power source device for charged beam system Granted JPS5218598A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9394875A JPS5218598A (en) 1975-08-01 1975-08-01 Power source device for charged beam system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9394875A JPS5218598A (en) 1975-08-01 1975-08-01 Power source device for charged beam system

Publications (2)

Publication Number Publication Date
JPS5218598A true JPS5218598A (en) 1977-02-12
JPS5637562B2 JPS5637562B2 (enExample) 1981-09-01

Family

ID=14096648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9394875A Granted JPS5218598A (en) 1975-08-01 1975-08-01 Power source device for charged beam system

Country Status (1)

Country Link
JP (1) JPS5218598A (enExample)

Also Published As

Publication number Publication date
JPS5637562B2 (enExample) 1981-09-01

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