JPS5636808B2 - - Google Patents
Info
- Publication number
- JPS5636808B2 JPS5636808B2 JP7614477A JP7614477A JPS5636808B2 JP S5636808 B2 JPS5636808 B2 JP S5636808B2 JP 7614477 A JP7614477 A JP 7614477A JP 7614477 A JP7614477 A JP 7614477A JP S5636808 B2 JPS5636808 B2 JP S5636808B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7614477A JPS5411693A (en) | 1977-06-28 | 1977-06-28 | Processig method for elastic surface wave substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7614477A JPS5411693A (en) | 1977-06-28 | 1977-06-28 | Processig method for elastic surface wave substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5411693A JPS5411693A (en) | 1979-01-27 |
| JPS5636808B2 true JPS5636808B2 (en, 2012) | 1981-08-26 |
Family
ID=13596793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7614477A Granted JPS5411693A (en) | 1977-06-28 | 1977-06-28 | Processig method for elastic surface wave substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5411693A (en, 2012) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61115314U (en, 2012) * | 1985-06-25 | 1986-07-21 | ||
| JP2003017983A (ja) * | 2001-06-28 | 2003-01-17 | Kyocera Corp | 弾性波装置用ウエハ及びそれを用いた弾性波装置 |
| JP2022068747A (ja) * | 2020-10-22 | 2022-05-10 | 住友金属鉱山株式会社 | 酸化物単結晶ウエハ、複合基板用ウエハ、複合基板、酸化物単結晶ウエハの加工方法、酸化物単結晶ウエハの製造方法、複合基板用ウエハの製造方法および複合基板の製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5353288A (en) * | 1976-10-25 | 1978-05-15 | Toshiba Corp | Piezoelectric substrate |
-
1977
- 1977-06-28 JP JP7614477A patent/JPS5411693A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61115314U (en, 2012) * | 1985-06-25 | 1986-07-21 | ||
| JP2003017983A (ja) * | 2001-06-28 | 2003-01-17 | Kyocera Corp | 弾性波装置用ウエハ及びそれを用いた弾性波装置 |
| JP2022068747A (ja) * | 2020-10-22 | 2022-05-10 | 住友金属鉱山株式会社 | 酸化物単結晶ウエハ、複合基板用ウエハ、複合基板、酸化物単結晶ウエハの加工方法、酸化物単結晶ウエハの製造方法、複合基板用ウエハの製造方法および複合基板の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5411693A (en) | 1979-01-27 |