JPS563663B2 - - Google Patents
Info
- Publication number
- JPS563663B2 JPS563663B2 JP15161576A JP15161576A JPS563663B2 JP S563663 B2 JPS563663 B2 JP S563663B2 JP 15161576 A JP15161576 A JP 15161576A JP 15161576 A JP15161576 A JP 15161576A JP S563663 B2 JPS563663 B2 JP S563663B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15161576A JPS5375774A (en) | 1976-12-16 | 1976-12-16 | Exposure unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15161576A JPS5375774A (en) | 1976-12-16 | 1976-12-16 | Exposure unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5375774A JPS5375774A (en) | 1978-07-05 |
| JPS563663B2 true JPS563663B2 (cs) | 1981-01-26 |
Family
ID=15522399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15161576A Granted JPS5375774A (en) | 1976-12-16 | 1976-12-16 | Exposure unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5375774A (cs) |
-
1976
- 1976-12-16 JP JP15161576A patent/JPS5375774A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5375774A (en) | 1978-07-05 |