JPS563660B2 - - Google Patents

Info

Publication number
JPS563660B2
JPS563660B2 JP14048576A JP14048576A JPS563660B2 JP S563660 B2 JPS563660 B2 JP S563660B2 JP 14048576 A JP14048576 A JP 14048576A JP 14048576 A JP14048576 A JP 14048576A JP S563660 B2 JPS563660 B2 JP S563660B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14048576A
Other languages
Japanese (ja)
Other versions
JPS5364479A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14048576A priority Critical patent/JPS5364479A/en
Publication of JPS5364479A publication Critical patent/JPS5364479A/en
Publication of JPS563660B2 publication Critical patent/JPS563660B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP14048576A 1976-11-22 1976-11-22 Position aligning system Granted JPS5364479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14048576A JPS5364479A (en) 1976-11-22 1976-11-22 Position aligning system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14048576A JPS5364479A (en) 1976-11-22 1976-11-22 Position aligning system

Publications (2)

Publication Number Publication Date
JPS5364479A JPS5364479A (en) 1978-06-08
JPS563660B2 true JPS563660B2 (en) 1981-01-26

Family

ID=15269690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14048576A Granted JPS5364479A (en) 1976-11-22 1976-11-22 Position aligning system

Country Status (1)

Country Link
JP (1) JPS5364479A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2562270Y2 (en) * 1991-04-23 1998-02-10 安藤電気株式会社 Stopping mechanism of moving object by light

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51120180A (en) * 1975-04-15 1976-10-21 Nippon Telegr & Teleph Corp <Ntt> Pattern printing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51120180A (en) * 1975-04-15 1976-10-21 Nippon Telegr & Teleph Corp <Ntt> Pattern printing device

Also Published As

Publication number Publication date
JPS5364479A (en) 1978-06-08

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