JPS563660B2 - - Google Patents
Info
- Publication number
- JPS563660B2 JPS563660B2 JP14048576A JP14048576A JPS563660B2 JP S563660 B2 JPS563660 B2 JP S563660B2 JP 14048576 A JP14048576 A JP 14048576A JP 14048576 A JP14048576 A JP 14048576A JP S563660 B2 JPS563660 B2 JP S563660B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14048576A JPS5364479A (en) | 1976-11-22 | 1976-11-22 | Position aligning system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14048576A JPS5364479A (en) | 1976-11-22 | 1976-11-22 | Position aligning system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5364479A JPS5364479A (en) | 1978-06-08 |
JPS563660B2 true JPS563660B2 (en) | 1981-01-26 |
Family
ID=15269690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14048576A Granted JPS5364479A (en) | 1976-11-22 | 1976-11-22 | Position aligning system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5364479A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2562270Y2 (en) * | 1991-04-23 | 1998-02-10 | 安藤電気株式会社 | Stopping mechanism of moving object by light |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51120180A (en) * | 1975-04-15 | 1976-10-21 | Nippon Telegr & Teleph Corp <Ntt> | Pattern printing device |
-
1976
- 1976-11-22 JP JP14048576A patent/JPS5364479A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51120180A (en) * | 1975-04-15 | 1976-10-21 | Nippon Telegr & Teleph Corp <Ntt> | Pattern printing device |
Also Published As
Publication number | Publication date |
---|---|
JPS5364479A (en) | 1978-06-08 |